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The Scandium Solution Automation provides a universally expandable application environment for fully automatic control of motorized stages and quantitative analysis processes.
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Fully automatic control of motorized stages
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Complete automation of recurring processes
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Positioning on structured wafers
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The Scandium Solution Automation provides a universally expandable application environment for fully automatic control of motorized stages and quantitative analysis processes. Image acquisition, filtering, image processing, image analysis as well as data archiving and report generation can be automated. The integrated stage control supports specific user-defined positions as well as the scanning of entire sample surfaces. The Scandium Solution Automation also supports fully automated positioning on structured wafers and lithography masks. Integrated calibration routines for the rotation and tilt correction of the wafer and an integrated backlash correction of the motor stage ensure precise alignment and positioning. This software extension simplifies the most complex workflows by automating tasks such as line-width measurement. Entire wafers can be scanned automatically, single dies or clusters of dies as well.
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ADDA3 - SEM / STEM Scan Interface
Upgrade your old analog or digital scanning electron microscope to a modern high performance device.
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